![]() SOI500 |
![]() SOI600 |
● 豐富的成像照明系統
● 超大掃描視場
● 智能檢測
● 低成本
● 支持多種工況
● 出色的殘膠檢測功能
● 離線軟件
型號 | SOI500 | SOI510 |
分辨率 | ≥0.5μm | ≥0.5μm |
晶圓尺寸 | 150mm or 200mm or 300mm | 150mm or 200mm or 300mm |
照明模式 | Dark field and bright field | Dark field and bright field |
倍率 | 2X, 3.5X, 5X, 10X, 20X |
2X, 3.5X, 5X, 10X, 20X |
工件臺 | X/Y/Rz axis, independent Z axis | X/Y/Rz axis, independent Z axis |
掃描檢測時間 | 300mm:130s@3μm 200mm: 76s@3μm |
300mm: 30s@1.43μm 200mm: 20s@1.43μm |
型號 | SOI600 | SOI610 |
晶圓尺寸 | 200mm or 300mm | 200mm or 300mm |
微觀缺陷檢查 | Auto-photo mode | Auto-photo mode; KLARF File and Review are available; 2X lens photomerge for whole wafer
|
倍率 | 1X, 2X, 3.5X, 5X, 10X, 20X, 50X, 100X |
1X, 2X, 3.5X, 5X, 10X, 20X, 50X, 100X |
宏觀缺陷檢查 | Tilt range: -30°~30° | Tilt range: -30°~30° |
背面宏觀缺陷檢查 | Backside edge: -5°~180° Backside center: 0°~360°
|
Backside edge: -5°~180° Backside center: 0°~360°
|
宏觀相機分辨率 | 2048×2048 | 2048×2048 |
產率 | ≥140WPH |
≥140WPH |